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The measurement and uncertainty of a calibration standard for the scanning electron microscope.

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Bibliographic Details
Title: The measurement and uncertainty of a calibration standard for the scanning electron microscope.
Authors: Fu, J., Croarkin, M. C., Vorburger, T. V.
Source: Journal of Research of the National Institute of Standards & Technology; March/April 1994, Vol. 99, p191-199, 9p
Database: Applied Science & Technology Source
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