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Preferential sputtering and surface binding energy in metal silicides.

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Bibliographic Details
Title: Preferential sputtering and surface binding energy in metal silicides.
Authors: Zaporozchenko, V. I., Stepanova, M. G., Vojtusik, S. S.
Source: Vacuum; May 1996, Vol. 47, p421-424, 4p
Database: Applied Science & Technology Source
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