APA (7th ed.) Citation

Chen, C. R., & Chen, L. J. (1995). Morphological evolution of the low-temperature oxidation of silicon with a gold overlayer. Journal of Applied Physics, 78, 919. https://doi.org/10.1063/1.360283

Chicago Style (17th ed.) Citation

Chen, C. R., and L. J. Chen. "Morphological Evolution of the Low-temperature Oxidation of Silicon with a Gold Overlayer." Journal of Applied Physics 78 (1995): 919. https://doi.org/10.1063/1.360283.

MLA (9th ed.) Citation

Chen, C. R., and L. J. Chen. "Morphological Evolution of the Low-temperature Oxidation of Silicon with a Gold Overlayer." Journal of Applied Physics, vol. 78, 1995, p. 919, https://doi.org/10.1063/1.360283.