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Is Ti contamination in Si wafer processing an issue?

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Bibliographic Details
Title: Is Ti contamination in Si wafer processing an issue?
Authors: Chang, Li-Hsin, Cowden, William G., Christiansen, Jim
Source: Journal of the Electrochemical Society; July 1996, Vol. 143, p2353-2356, 4p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500334146
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Is Ti contamination in Si wafer processing an issue?
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chang%2C+Li-Hsin%22">Chang, Li-Hsin</searchLink><br /><searchLink fieldCode="AU" term="%22Cowden%2C+William+G%2E%22">Cowden, William G.</searchLink><br /><searchLink fieldCode="AU" term="%22Christiansen%2C+Jim%22">Christiansen, Jim</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; July 1996, Vol. 143, p2353-2356, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500334146
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.1837006
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 2353
    Titles:
      – TitleFull: Is Ti contamination in Si wafer processing an issue?
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chang, Li-Hsin
      – PersonEntity:
          Name:
            NameFull: Cowden, William G.
      – PersonEntity:
          Name:
            NameFull: Christiansen, Jim
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: July 1996
              Type: published
              Y: 1996
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 143
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
ResultId 1