Reliability of metal-oxide-semiconductor capacitors on nitrogen implanted 4H-silicon carbide.
Saved in:
| Title: | Reliability of metal-oxide-semiconductor capacitors on nitrogen implanted 4H-silicon carbide. |
|---|---|
| Authors: | Treu, M., Burte, E. P., Schörner, R. |
| Source: | Journal of Applied Physics; September 1 1998, Vol. 84 Issue 5, p2943-2948, 6p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
|---|---|
| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 500419408 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: Reliability of metal-oxide-semiconductor capacitors on nitrogen implanted 4H-silicon carbide. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Treu%2C+M%2E%22">Treu, M.</searchLink><br /><searchLink fieldCode="AU" term="%22Burte%2C+E%2E+P%2E%22">Burte, E. P.</searchLink><br /><searchLink fieldCode="AU" term="%22Schörner%2C+R%2E%22">Schörner, R.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; September 1 1998, Vol. 84 Issue 5, p2943-2948, 6p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500419408 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.368399 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 2943 Titles: – TitleFull: Reliability of metal-oxide-semiconductor capacitors on nitrogen implanted 4H-silicon carbide. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Treu, M. – PersonEntity: Name: NameFull: Burte, E. P. – PersonEntity: Name: NameFull: Schörner, R. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: September 1 1998 Type: published Y: 1998 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 84 – Type: issue Value: 5 Titles: – TitleFull: Journal of Applied Physics Type: main |
| ResultId | 1 |