APA (7th ed.) Citation

Bauer, A. J., Burte, E. P., & Ryssel, H. (1997). Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride. Solid-State Electronics, 41, 1057. https://doi.org/10.1016/S0038-1101(97)00056-7

Chicago Style (17th ed.) Citation

Bauer, A. J., E. P. Burte, and H. Ryssel. "Characterization of Ultrathin ON Stacked Layers Consisting of Thermally Grown Bottom Oxide and Deposited Silicon Nitride." Solid-State Electronics 41 (1997): 1057. https://doi.org/10.1016/S0038-1101(97)00056-7.

MLA (9th ed.) Citation

Bauer, A. J., et al. "Characterization of Ultrathin ON Stacked Layers Consisting of Thermally Grown Bottom Oxide and Deposited Silicon Nitride." Solid-State Electronics, vol. 41, 1997, p. 1057, https://doi.org/10.1016/S0038-1101(97)00056-7.