Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride.
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| Title: | Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride. |
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| Authors: | Bauer, A. J., Burte, E. P., Ryssel, H. |
| Source: | Solid-State Electronics; July 1997, Vol. 41, p1057-1065, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/S0038-1101(97)00056-7 |
