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Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride.

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Bibliographic Details
Title: Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride.
Authors: Bauer, A. J., Burte, E. P., Ryssel, H.
Source: Solid-State Electronics; July 1997, Vol. 41, p1057-1065, 9p
Database: Applied Science & Technology Source
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