Structural and chemical characterization of as-deposited microcrystalline indium oxide films prepared by dc reactive magnetron sputtering.
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| Title: | Structural and chemical characterization of as-deposited microcrystalline indium oxide films prepared by dc reactive magnetron sputtering. |
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| Authors: | Xirouchaki, C., Moschovis, K., Chatzitheodoridis, E. |
| Source: | Journal of Electronic Materials; January 1999, Vol. 28 Issue 1, p26-34, 9p |
| Database: | Applied Science & Technology Source |
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