APA (7th ed.) Citation

Tabib-Azar, M., Akinwande, D., & Ponchak, G. E. (1999). Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors. Review of Scientific Instruments, 70(7), 3083. https://doi.org/10.1063/1.1149871

Chicago Style (17th ed.) Citation

Tabib-Azar, M., D. Akinwande, and G. E. Ponchak. "Evanescent Microwave Probes on High-resistivity Silicon and Its Application in Characterization of Semiconductors." Review of Scientific Instruments 70, no. 7 (1999): 3083. https://doi.org/10.1063/1.1149871.

MLA (9th ed.) Citation

Tabib-Azar, M., et al. "Evanescent Microwave Probes on High-resistivity Silicon and Its Application in Characterization of Semiconductors." Review of Scientific Instruments, vol. 70, no. 7, 1999, p. 3083, https://doi.org/10.1063/1.1149871.