Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors.

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Bibliographic Details
Title:	Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors.
Authors:	Tabib-Azar, M., Akinwande, D., Ponchak, G. E.
Source:	Review of Scientific Instruments; July 1999, Vol. 70 Issue 7, p3083-3086, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	00346748
DOI:	10.1063/1.1149871