Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors.
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| Title: | Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors. |
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| Authors: | Tabib-Azar, M., Akinwande, D., Ponchak, G. E. |
| Source: | Review of Scientific Instruments; July 1999, Vol. 70 Issue 7, p3083-3086, 4p |
| Database: | Applied Science & Technology Source |
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