Simpson, R., Danko, J., & Watts, M. (1999). Laser improvements benefit darkfield wafer inspection. Laser Focus World, 35(10), 144.
Chicago Style (17th ed.) CitationSimpson, Rob, Joe Danko, and Michael Watts. "Laser Improvements Benefit Darkfield Wafer Inspection." Laser Focus World 35, no. 10 (1999): 144.
MLA (9th ed.) CitationSimpson, Rob, et al. "Laser Improvements Benefit Darkfield Wafer Inspection." Laser Focus World, vol. 35, no. 10, 1999, p. 144.
Warning: These citations may not always be 100% accurate.