Electrical characterization of He-ion implantation-induced deep levels in p+ n InP junctions.

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Bibliographic Details
Title: Electrical characterization of He-ion implantation-induced deep levels in p+ n InP junctions.
Authors: Quintanilla, L., Pinacho, R., Enriquez, L.
Source: Journal of Applied Physics; November 1 1999, Vol. 86 Issue 9, p4855-4860, 6p
Database: Applied Science & Technology Source
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