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Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.

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Title: Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.
Authors: Pichon, L., Straboni, A., Girardeau, T.
Source: Journal of Applied Physics; January 15 2000, Vol. 87 Issue 2, p925-932, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500636034
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Pichon%2C+L%2E%22">Pichon, L.</searchLink><br /><searchLink fieldCode="AU" term="%22Straboni%2C+A%2E%22">Straboni, A.</searchLink><br /><searchLink fieldCode="AU" term="%22Girardeau%2C+T%2E%22">Girardeau, T.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; January 15 2000, Vol. 87 Issue 2, p925-932, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500636034
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.371961
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 925
    Titles:
      – TitleFull: Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Pichon, L.
      – PersonEntity:
          Name:
            NameFull: Straboni, A.
      – PersonEntity:
          Name:
            NameFull: Girardeau, T.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 01
              Text: January 15 2000
              Type: published
              Y: 2000
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 87
            – Type: issue
              Value: 2
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1