Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.
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| Title: | Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films. |
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| Authors: | Pichon, L., Straboni, A., Girardeau, T. |
| Source: | Journal of Applied Physics; January 15 2000, Vol. 87 Issue 2, p925-932, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.371961 |
