Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope.

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Bibliographic Details
Title: Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope.
Authors: Tabib-Azar, M., Akinwande, D.
Source: Review of Scientific Instruments; March 2000, Vol. 71 Issue 3, p1460-1465, 6p
Database: Applied Science & Technology Source
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