High-performance CMOS circuits fabricated by excimer-laser-annealed poly-Si TFTs on glass substrates.
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| Title: | High-performance CMOS circuits fabricated by excimer-laser-annealed poly-Si TFTs on glass substrates. |
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| Authors: | Mishima, Y., Yoshino, K., Takeuchi, F. |
| Source: | IEEE Electron Device Letters; February 2001, Vol. 22 Issue 2, p89-91, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07413106 |
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| DOI: | 10.1109/55.902841 |