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High-performance CMOS circuits fabricated by excimer-laser-annealed poly-Si TFTs on glass substrates.

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Bibliographic Details
Title: High-performance CMOS circuits fabricated by excimer-laser-annealed poly-Si TFTs on glass substrates.
Authors: Mishima, Y., Yoshino, K., Takeuchi, F.
Source: IEEE Electron Device Letters; February 2001, Vol. 22 Issue 2, p89-91, 3p
Database: Applied Science & Technology Source
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