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Dominant iron gettering mechanism in p/p+ silicon wafers.

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Bibliographic Details
Title: Dominant iron gettering mechanism in p/p+ silicon wafers.
Authors: Lin, Wen, Benton, J. L., Pinacho, R.
Source: Applied Physics Letters; July 10 2000, Vol. 77 Issue 2, p241-243, 3p
Database: Applied Science & Technology Source
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