APA (7th ed.) Citation

Singer, I. L. (1984). Compositions of metals implanted to very high fluences. Vacuum, 34, 853. https://doi.org/10.1016/0042-207X(84)90163-5

Chicago Style (17th ed.) Citation

Singer, I. L. "Compositions of Metals Implanted to Very High Fluences." Vacuum 34 (1984): 853. https://doi.org/10.1016/0042-207X(84)90163-5.

MLA (9th ed.) Citation

Singer, I. L. "Compositions of Metals Implanted to Very High Fluences." Vacuum, vol. 34, 1984, p. 853, https://doi.org/10.1016/0042-207X(84)90163-5.