Linear dose dependence of ion beam mixing of metals on Si.

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Bibliographic Details
Title: Linear dose dependence of ion beam mixing of metals on Si.
Authors: Poker, D. B., Appleton, B. R.
Source: Journal of Applied Physics; February 15 1985, Vol. 57, p1414-1416, 3p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/1.334501