Linear dose dependence of ion beam mixing of metals on Si.
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| Title: | Linear dose dependence of ion beam mixing of metals on Si. |
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| Authors: | Poker, D. B., Appleton, B. R. |
| Source: | Journal of Applied Physics; February 15 1985, Vol. 57, p1414-1416, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.334501 |