A methodology and model for the pull-in parameters of electrostatic actuators.
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| Title: | A methodology and model for the pull-in parameters of electrostatic actuators. |
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| Authors: | Nemirovsky, Yael, Bochobza-Degani, Ofir |
| Source: | Journal of Microelectromechanical Systems; December 2001, Vol. 10 Issue 4, p601-615, 15p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/84.967384 |
