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A Novel Two-Step Annealing Technique for the Fabrication of High Performance Low Temperature Poly-Si TFTs.

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Bibliographic Details
Title: A Novel Two-Step Annealing Technique for the Fabrication of High Performance Low Temperature Poly-Si TFTs.
Authors: Fan, Ching-Lin, Chen, Mao-Chieh, Chang, Yih
Source: Journal of the Electrochemical Society; August 2003, Vol. 150 Issue 8, pH178-H181, 4p
Database: Applied Science & Technology Source
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