Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy.
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| Title: | Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy. |
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| Authors: | Mercere, Pascal, Zeitoun, Philippe, Idir, Mourad |
| Source: | Optics Letters; September 1 2003, Vol. 28 Issue 17, p1534-1536, 3p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 500891645 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Mercere%2C+Pascal%22">Mercere, Pascal</searchLink><br /><searchLink fieldCode="AU" term="%22Zeitoun%2C+Philippe%22">Zeitoun, Philippe</searchLink><br /><searchLink fieldCode="AU" term="%22Idir%2C+Mourad%22">Idir, Mourad</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Optics+Letters%22">Optics Letters</searchLink>; September 1 2003, Vol. 28 Issue 17, p1534-1536, 3p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500891645 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1364/OL.28.001534 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 3 StartPage: 1534 Titles: – TitleFull: Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Mercere, Pascal – PersonEntity: Name: NameFull: Zeitoun, Philippe – PersonEntity: Name: NameFull: Idir, Mourad IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: September 1 2003 Type: published Y: 2003 Identifiers: – Type: issn-print Value: 01469592 Numbering: – Type: volume Value: 28 – Type: issue Value: 17 Titles: – TitleFull: Optics Letters Type: main |
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