Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.
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| Title: | Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs. |
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| Authors: | Fan, Ching-Lin, Chen, Mao-Chieh |
| Source: | Journal of the Electrochemical Society; October 2002, Vol. 149 Issue 10, pG567-G573, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1504721 |
