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Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.

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Title: Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.
Authors: Fan, Ching-Lin, Chen, Mao-Chieh
Source: Journal of the Electrochemical Society; October 2002, Vol. 149 Issue 10, pG567-G573, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500931299
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.
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  Data: <searchLink fieldCode="AU" term="%22Fan%2C+Ching-Lin%22">Fan, Ching-Lin</searchLink><br /><searchLink fieldCode="AU" term="%22Chen%2C+Mao-Chieh%22">Chen, Mao-Chieh</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; October 2002, Vol. 149 Issue 10, pG567-G573, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500931299
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1149/1.1504721
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      – Code: eng
        Text: English
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        PageCount: 7
        StartPage: G567
    Titles:
      – TitleFull: Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.
        Type: main
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            NameFull: Fan, Ching-Lin
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            NameFull: Chen, Mao-Chieh
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            – D: 01
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              Text: October 2002
              Type: published
              Y: 2002
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              Value: 00134651
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              Value: 149
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              Value: 10
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            – TitleFull: Journal of the Electrochemical Society
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