View in EDS

Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.

Saved in:
Bibliographic Details
Title: Correlation Between Electrical Characteristics and Oxide/Polysilicon Interface Morphology for Excimer-Laser-Annealed Poly-Si TFTs.
Authors: Fan, Ching-Lin, Chen, Mao-Chieh
Source: Journal of the Electrochemical Society; October 2002, Vol. 149 Issue 10, pG567-G573, 7p
Database: Applied Science & Technology Source
Be the first to leave a comment!
You must be logged in first