An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.
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| Title: | An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices. |
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| Authors: | Bochobza-Degani, Ofir, Elata, David, Nemirovsky, Yael |
| Source: | Journal of Microelectromechanical Systems; October 2002, Vol. 11 Issue 5, p612-620, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2002.803280 |
