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An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.

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Bibliographic Details
Title: An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.
Authors: Bochobza-Degani, Ofir, Elata, David, Nemirovsky, Yael
Source: Journal of Microelectromechanical Systems; October 2002, Vol. 11 Issue 5, p612-620, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500936828
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.
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  Data: <searchLink fieldCode="AU" term="%22Bochobza-Degani%2C+Ofir%22">Bochobza-Degani, Ofir</searchLink><br /><searchLink fieldCode="AU" term="%22Elata%2C+David%22">Elata, David</searchLink><br /><searchLink fieldCode="AU" term="%22Nemirovsky%2C+Yael%22">Nemirovsky, Yael</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Microelectromechanical+Systems%22">Journal of Microelectromechanical Systems</searchLink>; October 2002, Vol. 11 Issue 5, p612-620, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500936828
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2002.803280
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 612
    Titles:
      – TitleFull: An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Bochobza-Degani, Ofir
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            NameFull: Elata, David
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            NameFull: Nemirovsky, Yael
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            – D: 01
              M: 10
              Text: October 2002
              Type: published
              Y: 2002
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              Value: 11
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              Value: 5
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            – TitleFull: Journal of Microelectromechanical Systems
              Type: main
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