APA (7th ed.) Citation

Leroux, C., Ghibaudo, G., Reimbold, G., Clerc, R., & Mathieu, S. (2002). Oxide thickness extraction methods in the nanometer range for statistical measurements. Solid-State Electronics, 46(11), 1849. https://doi.org/10.1016/S0038-1101(02)00164-8

Chicago Style (17th ed.) Citation

Leroux, C., G. Ghibaudo, G. Reimbold, R. Clerc, and S. Mathieu. "Oxide Thickness Extraction Methods in the Nanometer Range for Statistical Measurements." Solid-State Electronics 46, no. 11 (2002): 1849. https://doi.org/10.1016/S0038-1101(02)00164-8.

MLA (9th ed.) Citation

Leroux, C., et al. "Oxide Thickness Extraction Methods in the Nanometer Range for Statistical Measurements." Solid-State Electronics, vol. 46, no. 11, 2002, p. 1849, https://doi.org/10.1016/S0038-1101(02)00164-8.