Oxide thickness extraction methods in the nanometer range for statistical measurements.
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| Title: | Oxide thickness extraction methods in the nanometer range for statistical measurements. |
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| Authors: | Leroux, C., Ghibaudo, G., Reimbold, G., Clerc, R., Mathieu, S. |
| Source: | Solid-State Electronics; November 2002, Vol. 46 Issue 11, p1849-1854, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/S0038-1101(02)00164-8 |
