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Oxide thickness extraction methods in the nanometer range for statistical measurements.

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Bibliographic Details
Title: Oxide thickness extraction methods in the nanometer range for statistical measurements.
Authors: Leroux, C., Ghibaudo, G., Reimbold, G., Clerc, R., Mathieu, S.
Source: Solid-State Electronics; November 2002, Vol. 46 Issue 11, p1849-1854, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500943842
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: <searchLink fieldCode="JN" term="%22Solid-State+Electronics%22">Solid-State Electronics</searchLink>; November 2002, Vol. 46 Issue 11, p1849-1854, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500943842
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/S0038-1101(02)00164-8
    Languages:
      – Code: eng
        Text: English
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        PageCount: 6
        StartPage: 1849
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      – TitleFull: Oxide thickness extraction methods in the nanometer range for statistical measurements.
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            NameFull: Leroux, C.
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            NameFull: Ghibaudo, G.
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            NameFull: Reimbold, G.
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            NameFull: Clerc, R.
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            NameFull: Mathieu, S.
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              M: 11
              Text: November 2002
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              Y: 2002
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              Value: 00381101
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              Value: 46
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              Value: 11
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            – TitleFull: Solid-State Electronics
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