Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers.
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| Title: | Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers. |
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| Authors: | Perego, M., Ferrari, S., Spiga, S. |
| Source: | Applied Physics Letters; January 6 2003, Vol. 82 Issue 1, p121-123, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.1534937 |
