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Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers.

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Title: Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers.
Authors: Perego, M., Ferrari, S., Spiga, S.
Source: Applied Physics Letters; January 6 2003, Vol. 82 Issue 1, p121-123, 3p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500983476
AccessLevel: 2
PubType: Academic Journal
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  Data: Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers.
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  Data: <searchLink fieldCode="AU" term="%22Perego%2C+M%2E%22">Perego, M.</searchLink><br /><searchLink fieldCode="AU" term="%22Ferrari%2C+S%2E%22">Ferrari, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Spiga%2C+S%2E%22">Spiga, S.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; January 6 2003, Vol. 82 Issue 1, p121-123, 3p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500983476
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        Value: 10.1063/1.1534937
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      – Code: eng
        Text: English
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        PageCount: 3
        StartPage: 121
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      – TitleFull: Time of flight secondary ion mass spectrometry study of silicon nanoclusters embedded in thin silicon oxide layers.
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            NameFull: Perego, M.
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            NameFull: Ferrari, S.
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              Text: January 6 2003
              Type: published
              Y: 2003
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