Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.
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| Title: | Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics. |
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| Authors: | Peng, Y. C., Fu, G. S., Yu, W. |
| Source: | Semiconductor Science & Technology; Jun2004, Vol. 19 Issue 6, p759-763, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/19/6/018 |
