Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.
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| Title: | Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics. |
|---|---|
| Authors: | Peng, Y. C., Fu, G. S., Yu, W. |
| Source: | Semiconductor Science & Technology; Jun2004, Vol. 19 Issue 6, p759-763, 5p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 500992750 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Peng%2C+Y%2E+C%2E%22">Peng, Y. C.</searchLink><br /><searchLink fieldCode="AU" term="%22Fu%2C+G%2E+S%2E%22">Fu, G. S.</searchLink><br /><searchLink fieldCode="AU" term="%22Yu%2C+W%2E%22">Yu, W.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Semiconductor+Science+%26+Technology%22">Semiconductor Science & Technology</searchLink>; Jun2004, Vol. 19 Issue 6, p759-763, 5p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500992750 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1088/0268-1242/19/6/018 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 759 Titles: – TitleFull: Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Peng, Y. C. – PersonEntity: Name: NameFull: Fu, G. S. – PersonEntity: Name: NameFull: Yu, W. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 06 Text: Jun2004 Type: published Y: 2004 Identifiers: – Type: issn-print Value: 02681242 Numbering: – Type: volume Value: 19 – Type: issue Value: 6 Titles: – TitleFull: Semiconductor Science & Technology Type: main |
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