Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.

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Title: Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.
Authors: Peng, Y. C., Fu, G. S., Yu, W.
Source: Semiconductor Science & Technology; Jun2004, Vol. 19 Issue 6, p759-763, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500992750
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Peng%2C+Y%2E+C%2E%22">Peng, Y. C.</searchLink><br /><searchLink fieldCode="AU" term="%22Fu%2C+G%2E+S%2E%22">Fu, G. S.</searchLink><br /><searchLink fieldCode="AU" term="%22Yu%2C+W%2E%22">Yu, W.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Semiconductor+Science+%26+Technology%22">Semiconductor Science & Technology</searchLink>; Jun2004, Vol. 19 Issue 6, p759-763, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500992750
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1088/0268-1242/19/6/018
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 5
        StartPage: 759
    Titles:
      – TitleFull: Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Peng, Y. C.
      – PersonEntity:
          Name:
            NameFull: Fu, G. S.
      – PersonEntity:
          Name:
            NameFull: Yu, W.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: Jun2004
              Type: published
              Y: 2004
          Identifiers:
            – Type: issn-print
              Value: 02681242
          Numbering:
            – Type: volume
              Value: 19
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Semiconductor Science & Technology
              Type: main
ResultId 1