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Mechanical and thermal properties of physical vapour deposited alumina films-Part I: Thermal stability.

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Title: Mechanical and thermal properties of physical vapour deposited alumina films-Part I: Thermal stability.
Authors: Thurn, J., Cook, R. F.
Source: Journal of Materials Science; Aug2004, Vol. 39 Issue 15, p4799-4807, 9p
Database: Applied Science & Technology Source
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PubType: Academic Journal
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        Value: 10.1023/B:JMSC.0000035318.95497.d1
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        Text: English
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              Text: Aug2004
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