Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures.
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| Title: | Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures. |
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| Authors: | Sedky, Sherif, Howe, Roger T., King, Tsu-Jac |
| Source: | Journal of Microelectromechanical Systems; Aug2004, Vol. 13 Issue 4, p669-675, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2004.832189 |
