Analysis of Physical Properties of III-Nitride Thin Films by Nanoindentation.

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Bibliographic Details
Title:	Analysis of Physical Properties of III-Nitride Thin Films by Nanoindentation.
Authors:	Jian, Sheng-Rui, Fang, Te-Hua, Chuu, Der-San
Source:	Journal of Electronic Materials; June 2003, Vol. 32 Issue 6, p496-500, 5p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-003-0132-0