Holographic optical processing for submicrometer defect detection.
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| Title: | Holographic optical processing for submicrometer defect detection. |
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| Authors: | Fusek, R. L., Lin, L. H., Harding, K. |
| Source: | Optical Engineering; September/October 1985, Vol. 24, p731-734, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00913286 |
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