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Fast fabrication of silicon based microstructures using 355 nm UV laser.

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Bibliographic Details
Title: Fast fabrication of silicon based microstructures using 355 nm UV laser.
Authors: Pan, C. T., Hwang, Y. M., Hsieh, C. W.
Source: Materials Science & Technology; November 2005, Vol. 21 Issue 11, p1344-1348, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501161920
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Fast fabrication of silicon based microstructures using 355 nm UV laser.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Pan%2C+C%2E+T%2E%22">Pan, C. T.</searchLink><br /><searchLink fieldCode="AU" term="%22Hwang%2C+Y%2E+M%2E%22">Hwang, Y. M.</searchLink><br /><searchLink fieldCode="AU" term="%22Hsieh%2C+C%2E+W%2E%22">Hsieh, C. W.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Materials+Science+%26+Technology%22">Materials Science & Technology</searchLink>; November 2005, Vol. 21 Issue 11, p1344-1348, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501161920
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1179/174328405X46141
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 5
        StartPage: 1344
    Titles:
      – TitleFull: Fast fabrication of silicon based microstructures using 355 nm UV laser.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Pan, C. T.
      – PersonEntity:
          Name:
            NameFull: Hwang, Y. M.
      – PersonEntity:
          Name:
            NameFull: Hsieh, C. W.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 11
              Text: November 2005
              Type: published
              Y: 2005
          Identifiers:
            – Type: issn-print
              Value: 02670836
          Numbering:
            – Type: volume
              Value: 21
            – Type: issue
              Value: 11
          Titles:
            – TitleFull: Materials Science & Technology
              Type: main
ResultId 1