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Effects of NH3 Plasma Pretreatment before Crystallization on Low-Temperature-Processed Poly-Si Thin-Film Transistors.

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Bibliographic Details
Title: Effects of NH3 Plasma Pretreatment before Crystallization on Low-Temperature-Processed Poly-Si Thin-Film Transistors.
Authors: Fan, Ching-Lin, Yang, Tsung-Hsien
Source: Journal of the Electrochemical Society; 2006, Vol. 153 Issue 8, pH161-H165, 5p
Database: Applied Science & Technology Source
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