The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating.

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Bibliographic Details
Title:	The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating.
Authors:	Burke, L. D., Naser, N. S., Sharna, R.
Source:	Journal of Applied Electrochemistry; March 2008, Vol. 38 Issue 3, p377-384, 8p
Database:	Applied Science & Technology Source

Description
ISSN:	0021891X
DOI:	10.1007/s10800-007-9449-3