Enhanced Crystallization and Improved Reliability for Low-Temperature-Processed Poly-Si TFTs With NH3-Plasma Pretreatment Before Crystallization.
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| Title: | Enhanced Crystallization and Improved Reliability for Low-Temperature-Processed Poly-Si TFTs With NH3-Plasma Pretreatment Before Crystallization. |
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| Authors: | Fan, Ching-Lin, Lai, Hui-Lung, Yang, Tsung-Hsien |
| Source: | IEEE Electron Device Letters; July 2006, Vol. 27 Issue 7, p576-578, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07413106 |
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| DOI: | 10.1109/LED.2006.877296 |
