Chen, P., Rodger, D. C., & Humayun, M. S. (2008). Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls. Journal of Microelectromechanical Systems, 17(6), 1352. https://doi.org/10.1109/JMEMS.2008.2004947
Chicago Style (17th ed.) CitationChen, Po-Jui, Damien C. Rodger, and Mark S. Humayun. "Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls." Journal of Microelectromechanical Systems 17, no. 6 (2008): 1352. https://doi.org/10.1109/JMEMS.2008.2004947.
MLA (9th ed.) CitationChen, Po-Jui, et al. "Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls." Journal of Microelectromechanical Systems, vol. 17, no. 6, 2008, p. 1352, https://doi.org/10.1109/JMEMS.2008.2004947.
Warning: These citations may not always be 100% accurate.