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Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls.

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Bibliographic Details
Title: Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls.
Authors: Chen, Po-Jui, Rodger, Damien C., Humayun, Mark S.
Source: Journal of Microelectromechanical Systems; December 2008, Vol. 17 Issue 6, p1352-1361, 10p
Database: Applied Science & Technology Source
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