Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films.
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| Title: | Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films. |
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| Authors: | Roper, Christopher S., Radmilovic, Velimir, Howe, Roger T. |
| Source: | Journal of the Electrochemical Society; 2009, Vol. 156 Issue 1, pD5-D10, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.3000002 |
