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Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3.

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Bibliographic Details
Title: Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3.
Authors: Roper, Christopher S., Howe, Roger T., Maboudian, Roya
Source: Journal of the Electrochemical Society; 2009, Vol. 156 Issue 3, pD104-D107, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501374501
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
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  Data: Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3.
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  Data: <searchLink fieldCode="AU" term="%22Roper%2C+Christopher+S%2E%22">Roper, Christopher S.</searchLink><br /><searchLink fieldCode="AU" term="%22Howe%2C+Roger+T%2E%22">Howe, Roger T.</searchLink><br /><searchLink fieldCode="AU" term="%22Maboudian%2C+Roya%22">Maboudian, Roya</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; 2009, Vol. 156 Issue 3, pD104-D107, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501374501
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.3061944
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: D104
    Titles:
      – TitleFull: Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Roper, Christopher S.
      – PersonEntity:
          Name:
            NameFull: Howe, Roger T.
      – PersonEntity:
          Name:
            NameFull: Maboudian, Roya
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          Dates:
            – D: 01
              M: 03
              Text: 2009
              Type: published
              Y: 2009
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              Value: 00134651
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              Value: 156
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
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