Vacancy-type defects in TiO2/SiO2/SiC dielectric stacks.
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| Title: | Vacancy-type defects in TiO2/SiO2/SiC dielectric stacks. |
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| Authors: | Coleman, P. G., Burrows, C. P., Mahapatra, R. |
| Source: | Journal of Applied Physics; July 1 2007, Vol. 102 Issue 1, p014106-014106, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.2752129 |
